Author Topic: New NIST DTSA-II user with QUESTION...  (Read 1689 times)


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New NIST DTSA-II user with QUESTION...
« on: October 25, 2017, 01:15:16 pm »

I just recently downloaded DTSA-II from NIST.  I have (I believe) a simple simulation I would like to run, but cannot seem to pull it out from DTSA.  Maybe someone can help me, or recommend another approach.

Question:  I want to show a simulation which tests whether Fluorine can be detected under 100Å of SiO2 using 5 kV.  As a follow up, I would like to plot that as a function of oxide thickness and ideally take-off angle.  For the fluorine, assume a buried 20Å film of PTFE.

Many thanks for any help!



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Re: New NIST DTSA-II user with QUESTION...
« Reply #1 on: October 25, 2017, 02:39:46 pm »
Hi Amadeo,
I can't speak to DTSA, but if you have downloaded CalcZAF you can easily generate a spectrum and intensities for a thin film model and a standard using the Penepma Monte Carlo software that it comes with:

A tutorial and examples are found here:

On a more crude basis one can simply calculate the absorption of F Ka in SiO2 using the Model Electron and Xray Ranges dialog in CalcZAF as shown here:

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Re: New NIST DTSA-II user with QUESTION...
« Reply #2 on: December 21, 2017, 05:06:01 am »
Look under "Tools > Simulation Alien".  The dialog will step you through the process.