Hello,
I just recently downloaded DTSA-II from NIST. I have (I believe) a simple simulation I would like to run, but cannot seem to pull it out from DTSA. Maybe someone can help me, or recommend another approach.
Question: I want to show a simulation which tests whether Fluorine can be detected under 100Å of SiO2 using 5 kV. As a follow up, I would like to plot that as a function of oxide thickness and ideally take-off angle. For the fluorine, assume a buried 20Å film of PTFE.
Many thanks for any help!
Amedeo