quantification of thinfilms on substrate data sets

[rraman64]

Hi,
I hit on DTSA while working with XRF & EDX analysis for thinfilms on silicon substrate. Instantly got hooked due to the simplicity in simulations & analysis.

While simulation options support thinfilm on substrate configuration, quantification methods do not support thinfilm/substrate configurations. If we use the available quantification method, we have to assume that film and substrate as homogeneous mixture.
stripping Si is not satisfactory.

Is there any other method to handle thinfilms?

Also is there any option to go for standardless analysis using ZAF (similar to PYMCA for XRF)?

thanks
rajaraman

[John Donovan]

While simulation options support thinfilm on substrate configuration, quantification methods do not support thinfilm/substrate configurations. If we use the available quantification method, we have to assume that film and substrate as homogeneous mixture.
stripping Si is not satisfactory.

Is there any other method to handle thinfilms?

You might want to check out BadgerFilm which is also free and designed specifically for quantification of thin films on substrates:

https://probesoftware.com/smf/index.php?board=37.0

[Nicholas Ritchie]

John's advice is good.  You can use DTSA-II to extract the k-ratios (via fitting to standards) which you then plug into BadgerFilm.

[rraman64]

Thanks a lot Prof Ritchie & Prof John for the prompt suggestions.
I will explore the Badgerfilm and get back!
regards
-rajaraman