I had the same problem before.
There are a normal SEM, a low vacuum FE-SEM, and a FE-EPMA in a room, additionally we have three water chillers, 5 rotary pumps (2, 2, and 1 for FE-EPMA, FE-SEM, and normal SEM, respectively), three UPSs, and two air conditioners in the same room.
It was so noisy, especially RPs and one old water chiller for normal SEM.
Acoustic enclosures found in internet were expensive and overqualified.
A local soundproofing company made enclosures for me and they work very well.
Now the most noisy one is UPS.
One thing you should consider is the enough space and ventilation of the enclosures.
Changkun