Author Topic: Using StrataGEM for Thin Film Data Processing  (Read 2666 times)


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Using StrataGEM for Thin Film Data Processing
« on: May 20, 2015, 10:33:54 am »
We use STRATAGem* for processing our multi voltage analysis (MVA) EPMA data to obtain both composition and thickness on thin films deposited on various substrates. However, if an element is present in both the film and substrate the film thickness or composition must be specified. Multiple layers can also be accommodated.

Here is the Probe for EPMA k-ratio export window for STRATAGem* reprocessing:

Here are the results for a thin film calculation in STRATAGem*:

The document attached below will be of assistance in exporting STRATAGem* results to Excel.

More discussion on thin film analysis in PFE can be found here:

* © Copyright 1993-2016 SAMx
« Last Edit: February 06, 2016, 08:07:01 am by John Donovan »
UofO MicroAnalytical Facility

Anette von der Handt

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Re: Using StrataGEM for Thin Film Data Processing
« Reply #1 on: May 07, 2017, 10:16:36 pm »
Philip Pinard has done it again! He has created a Python-based front-end for STRATAGem.

From the webpage: "stratagemtools is a Python interface to SAMx’s STRATAGem program. The interface allows, for example, to calculate k-ratios and compute film thickness in Python using the STRATAGem’s OEM interface, i.e. without the normal graphical interface. It gives an object oriented approach to microanalysis calculations.

stratagemtools was developed as part of the doctorate thesis project of Philippe T. Pinard at RWTH Aachen University (Aachen, Germany) under the supervision of Dr. Silvia Richter."
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