I was scratching my head for years (actually only 6 years, I am quite fresh in this field) about this dead time and PHA (those are tightly connected, and all missing counts at very high beam currents at intensive lines are missing due to that, I will explain that further). Unfortunately most of available educational material on these subjects are lacking and some are even completely misleading.
The "improvements" by vendors (i.e. enforced cutting off values bellow some energy in PHA, that is cutting out Ar esc-peak) hides the mechanism-behind away from such newcomers as me even more further. I should mention that our SXFIVE FE is equipped with 5 spectrometers where 4 have large xtals. Due to being a FEG machine it has only single condenser lens, which makes changing between high and low currents during single analysis not practical, the power of condenser needs to be changed enormous (compared to 2-lense system, i.e. sx100), and requires thermal equilibrium time to stabilize. So for this reason when we want to measure trace elements with high or very high (max available current, or "more power, Scotty") current, we also analyze major elements with same conditions. I had done similar experiments as here a few years ago: with total counts/real time vs cnts/beam current and wondered with few things: non linearity of that, and PHA peak deformation and shift. My "cure" for this problem was (and is up to now, but maybe it will change) making separate calibrations at high current - this minimizes the effect, but does not completely eliminates it, and generally is cumbersome.
I should tell that lately I am very into electronics (probably inherited genes, I have good memories how my dad was building synthesizers, and I love the smell of solder fumes (burnt rosin flux). Whole last month I got an excuse to apply my hobby obsession on our SX100, as it had broke down. Due to Covid crisis we had no clients for month, and I had plenty of time to be not bothered - just machine and me. After fixing major problems (lens supply) I got into hunting and troubleshooting small issues which had accumulated through years. Also Covid situation showed that remote control of machine is not easy, ergonomic or efficient, particularly that at home I have 3Mb/s internet - that simply sucks. And I know that plenty of our customers has similar connectivity problems, thus to overcome such problem I was inspecting options for custom hardware (+ software), which would send lossless video through network with lowest possible latency with lowest bandwidth. There is this unused EDS slot on electronics motherboard (we have no full version of Bruker Esprit, with full license that slot would be used by cable to EDS card for video and external scan generation). While my main aim is extracting the video signal, however led by curiosity I had probed (with oscilloscope) the WDS signal pins exposed there. It outputs counts as pulses (5V). wait... I am going to design the chip, which will use only video pins and leave those other signals just in peace? All kind of possibilities came into my mind, there are tons of limitations in Cameca Peaksight software and hardware acquisitions (limited mapping resolutions as an example, or limited resolution of WDS scans), and these pins with right hardware and software can at last let me go over it.
So the digital WDS pulse has 500 ns width. (i had no idea about WDS schematics at that point, nothing had broken there). And so I got many important questions in my head "what if". If I would want to count peaks what kind of counter chip I would need, 500ns stuffed at full side by side would do 2Mhz. Can two peaks exist side by side (which would exclude counter chip working on rising edges, thus would need more expensive complicated chip/system)? To find answer to this questions I had set beam to burning 3 micro-amperes to find out how dense these peaks can get! Ni Ma line on TAP for x-rays of stage just was enough. The x-ray meter on the monitor showed E6 level (white) - just excellent.
So with persistence set on oscilloscope for 2 seconds I had found out that
digital pulses are aligned perfectly at 1 μs steps. The closest pulse (rising edge) to the triggered pulse was 4 μs counting from the rising edge of the triggered pulse. That is consistent with software set dead time to 3µs. So despite digital pulse being only 500ns, it represents 1μs step, and thus setting deadtime to non-integer values makes no sense. Changing the dead time changes the length of gap between closest pulses, or in other words enforces the rejection of anything at interval counting from 1+set_dead_time counting from rising edge of the last counted pulse. And then I asked myself the politically incorrect question: could there be "pile-up" peaks on proportional counter?
The short answer is.... (drumroll... dramatic music) yes.

So led by my curiosity, I hanged oscilloscope probe on the raw spectrometer signal (by raw I mean the signal coming out from spectrometer, not processed with spectrometer board). The set dead time in GUI does not affect anything there, and with high intensity beam the closest peak from triggered rising edge is 2μs apart.
The peaks coming from pre-amplifier (and mild opamp, for spec- intermediate board transfer)
have about 1μs width.
So the smallest gap between two peaks is... 1μs. Interestingly looking at small time scale it is clear that peaks (and gaps) are aligned at 1μs steps. Now lets stop here, I understand why digital pulses are aligned like that, but analog pulses? Would that intend that electron beam is pulsing beam in 1MHz?Anyway, this is another proof showing that setting dead time to non-integer values makes no sense. So if minimal observed gaps are 1μs thus physical dead time of counter is 1μs, why simply not set the dead time to 1μs and leave like that? We could do that if only there would be no pile-ups and higher order diff x-rays... because this physical dead time depends from amplitude of peak it follows. High order of more energetic peak (or pile-up peak) will produce following voltage drop which is proportional to amplitude of peak, and relaxation time is proportional too. It does not matter if PHA is set to diff or integral - those filtering is applied much latter in the processing pipeline, and does not eliminate physical influence and physical dead time of those higher energy peaks.
So lets talk about the pile-ups. I wouldn't believe it if I wouldn't see it. While running on low current with zoom out view in oscilloscope it is clear that dominating peaks have very similar amplitude. With increase of current to the moment there density of peaks increases, there starts to appear double of amplitude peaks, and with increase of current further triple amplitude and more appears. (i.e. dominating amplitude of ~300mV at 20nA, after going to very high current (2μA) some peaks with 1.5V amplitude appeared -that is quadruple pile-up!).
But that is not all, remember Ar escape peaks? Filtered out they said... filtered out single Ar escape events, but... with high intensity beam there is so many Ar escape peaks that they pile up on themselves, and pile up on the analysed line peak, and on piled-up peaks. And.... this is where You get right wing tail in PHA peak, and gap between peaks is smoothed out by Ar esc piling up.
So with oscilloscope probing the raw spectrometer output I had checked how well the auto PHA works for high current. It does not. It sets the bias too high, which leads to multitude of argon peaks, which gets hidden out ("good" job Cameca for dumbing PHA down). With oscilloscope probing, I could reduce bias to the level where Ar esc peaks just disappear.According answer about PHA from one of Cameca engineers, at integral mode pulses up to 15 V are summed (5.5 to 15V is not probed for and thus not shown by PHA).
So why we get PHA peak shifts depending from current? I guess there is some smoothing algorithm before raw peaks are processed, with Ar esc peaks which gets very numerous the smoothed background would be much higher, and thus would decrease the relative amplitude of main peaks.
So my final words:
The 3μs is set by default as the best compromise universal dead time. It can safely be lowered to 1μs if working on low current, and no high order overlapping peaks are at the position. However if high order high energy overlap is expected (despite diff or integral), it is good idea to increase dead time. At high counting rate, due to pile-up'ed pulses physical dead time can be randomly larger than 3μs, and it would be safe to increase the dead time (actually increasing dead time is always most safe option, but not most efficient), albeit that won't fix missing counts, which is a product of counting pile-up peaks as single pulse (integral) or completely discarded (diff mode).