What is the detection limit of the microprobe?
What a terrific question! So if no one minds, I'd like to take a crack at this...
Of course, the typical "scientific" answer is "it depends". Which isn't very helpful, so instead we can ask, "On what does the detection limit of the microprobe depend?" And that is where it gets interesting... so rather than simply provide some rough numbers as is usually done, e.g., EDS 1000 PPM, WDS 100 PPM, let's determine the actual detection limit of our measurement by investigating the physics, and here are some of the "usual suspects":
1. Electron energy: generally the higher the primary (incident) beam energy, the larger the interaction volume because the higher energy electrons travel further than lower energy electrons and thus interact with more atoms before their energy drops below the critical excitation energy of the emission line under observation. This is why many trace element analyses are performed at 20, 25 or even 30 keV. It's the usual tradeoff between spatial resolution and sensitivity!
Exception: for many low energy emission lines, increasing the electron beam energy will cause an apparent decrease in the x-ray intensity because at very high over voltages, that is, the electron beam energy divided by the emission line critical ionization edge energy (Eo/Ec), the efficiency of ionization decreases with increasing overvoltage. In addition, very low energy emission lines will often only be emitted (as opposed to generated) from a volume very close to the sample surface due to matrix absorption, so increasing the interaction volume by increasing the electron beam energy does not improve the detection limit for these low energy emission lines such as, oxygen, nitrogen, carbon, etc.
2. Beam current: Obviously increasing the electron dosage increases the number of ionization in a linear way. Statistically speaking, doubling the beam energy will (all other considerations aside, such as sample damage), typically increase the detection limit by the square root of two (think about it!).
3. Geometric efficiency: using a larger Bragg crystal is approximately an increase in the diffraction surface area. Using a spectrometer with a smaller focal circle is essentially subtending a larger collection angle and both methods will improve the sensitivity of the measurement.
Another method which can be used in addition to the above methods, is to simply count on multiple WDS spectrometers and combine the photons for both the on and off-peak measurements for the unknown (and also combine the on and off-peak photons for the standard as well). This is called the "aggregate" method in Probe for EPMA and is described in this paper:
http://epmalab.uoregon.edu/pdfs/3631Donovan.pdf4. Matrix absorption: This was already mentioned, but is important that we include this effect in the calculation of detection limit, because as we lose photons to absorption, so does our sensitivity decrease. Lose half the photons because they don't escape from the sample due to photo-absorption, and we need to count twice as long. This effect can be approximated by including the matrix correction in the sensitivity calculation.
5. Counting statistics: Obviously since photon production is a quantum process we need to apply statistical considerations to the sensitivity calculation. If you only count long enough to either see or not see a photon, we have a lot of uncertainty to deal with.
![Wink ;)](https://probesoftware.com/smf/Smileys/default/wink.gif)
Fortunately photon counting statistics, although technically Poisson distributions (especially at very low count rates), is approximated by Gaussian (normal) statistics at reasonable count rates.
I'm leaving out a few other factors, but let's put these together in a typical detection limit calculation, this one from Goldstein et al. and is described as: a single point detection limit calculation based on the standard counts and the unknown background counts and including the magnitude of the ZAF correction factor. The calculation is adapted from Love and Scott (1983). This detection limit calculation is useful in that it can be used even on inhomogeneous samples and can be quoted as the detection limit in weight percent for a single analysis line with a confidence of 99% (assumes 3 standard deviations above the background).
![](https://probesoftware.com/smf/oldpics/i40.tinypic.com/11gjcat.jpg)
So a few of the factors described above are included here nicely. We have the ZAF matrix correction term (which could be any matrix correction such as Phi-rho-z, alpha-factors, etc.), the square root of the background intensity approximates the statistical variance, the factor 3 gives us 3 sigma statistics, the standard intensity normalizes this to concentration and times 100 gives us weight percent.
What does this look like in practice?
Well here's a typical major element analysis of a silicate glass standard in Probe for EPMA, acquired as a standard, *but* analyzed as an unknown.
St 160 Set 7 NBS K-412 mineral glass, Results in Elemental Weight Percents
ELEM: Na Si K Al Mg Ca Ti Mn Fe P Cr O H
TYPE: ANAL ANAL ANAL ANAL ANAL ANAL ANAL ANAL ANAL ANAL ANAL SPEC SPEC
BGDS: MAN MAN LIN MAN MAN MAN LIN LIN MAN EXP LIN
TIME: 20.00 15.00 20.00 20.00 30.00 40.00 10.00 10.00 30.00 20.00 15.00
BEAM: 19.80 19.80 19.80 19.80 19.80 19.80 19.80 19.80 19.80 19.80 19.80
ELEM: Na Si K Al Mg Ca Ti Mn Fe P Cr O H SUM
365 .037 21.171 .007 4.808 11.703 10.870 -.009 .050 7.870 .015 .012 43.597 .000 100.131
366 .044 21.212 .012 4.798 11.704 10.860 .014 .062 7.635 .008 .009 43.597 .000 99.955
367 .042 21.316 .016 4.822 11.640 11.073 .011 .069 7.697 .018 .004 43.597 .000 100.305
AVER: .041 21.233 .012 4.809 11.682 10.934 .005 .060 7.734 .014 .009 43.597 .000 100.130 <-- measured
SDEV: .004 .075 .004 .012 .037 .120 .013 .010 .122 .005 .004 .000 .000 .175
SERR: .002 .043 .003 .007 .021 .069 .007 .006 .070 .003 .002 .000 .000
%RSD: 8.65 .35 37.11 .25 .31 1.10 244.23 16.27 1.57 37.98 45.58 .00 .00
PUBL: .043 21.199 n.a. 4.906 11.657 10.899 n.a. .077 7.742 n.a. n.a. 43.597 n.a. 100.120 <-- published or accepted
%VAR: -4.53 .16 --- -1.97 .21 .32 --- -21.55 -.10 --- --- .00 ---
DIFF: -.002 .034 --- -.097 .025 .035 --- -.017 -.008 --- --- .000 ---
STDS: 336 162 374 336 162 162 22 25 162 285 396 0 0
STKF: .0735 .2018 .1132 .1331 .0568 .1027 .5547 .7341 .0950 .1599 .3050 .0000 .0000
STCT: 2517.1 9998.1 5423.2 8306.3 2850.4 337.0 6456.1 14052.2 600.2 9598.3 5218.7 .0 .0
UNKF: .0002 .1624 .0001 .0328 .0777 .1011 .0000 .0005 .0653 .0001 .0001 .0000 .0000
UNCT: 7.1 8047.5 5.2 2044.3 3904.0 331.7 .5 9.6 412.5 5.9 1.3 .0 .0
UNBG: 11.0 10.8 29.1 26.7 19.4 1.4 5.3 18.1 7.6 37.8 12.4 .0 .0
ZCOR: 1.9912 1.3072 1.0956 1.4679 1.5026 1.0818 1.1827 1.2047 1.1841 1.3989 1.1586 .0000 .0000
KRAW: .0028 .8049 .0010 .2461 1.3696 .9844 .0001 .0007 .6872 .0006 .0002 .0000 .0000
PKBG: 1.64 742.73 1.18 77.63 201.78 235.18 1.10 1.54 55.21 1.16 1.11 .00 .00
INT%: ---- ---- ---- ---- -.08 ---- ---- ---- .00 ---- ---- ---- ----
Detection limit at 99 % Confidence in Elemental Weight Percent (Single Line):
ELEM: Na Si K Al Mg Ca Ti Mn Fe P Cr
365 .016 .008 .014 .010 .009 .023 .028 .031 .035 .016 .027
366 .016 .008 .015 .010 .009 .023 .027 .033 .035 .018 .027
367 .016 .008 .014 .010 .009 .023 .027 .029 .035 .016 .029
AVER: .016 .008 .014 .010 .009 .023 .027 .031 .035 .017 .028
SDEV: .000 .000 .000 .000 .000 .000 .001 .002 .000 .001 .001
SERR: .000 .000 .000 .000 .000 .000 .000 .001 .000 .000 .001Because all the measured elements were assigned to other standards (primary standards), the accuracy can be compared as seen in the AVER: and PUBL: lines. But for detection limits we will examine the section just above which is based on the equation already discussed.
The detection limit for each analysis line is printed along the average and variance of the detection limits. As one can see the detection limits range from 0.035 (350 PPM) for Fe to 0.008 (80 PPM) for Si. of course we really only care about the trace elements and they vary from 0.027 (270 PPM) for Ti to 0.016 (160 PPM) for Na.
Remember, these are 3 sigma calculations so they can be quoted to 99% confidence. What if the concentration measured is higher than the quoted 3 sigma detection limit? Well it means that the confidence of detection is *better* than 99%, say maybe 99.9% confidence. And if the concentration is below the 3 sigma detection limit, what does that mean? Well it means that we have less than 99% confidence of detection, say maybe 95% confidence.
For more information on using this calculation see the attachment below (remember to login to see attachments) from Karsten Goemann's most recent rewrite of the PFE Advanced Topics manual starting on page 116.
For more information on correcting negative values using a "blank correction" see this thread here:
http://probesoftware.com/smf/index.php?topic=29.0and also check out the PPT slide attached below and this thread on quant trace element mapping in CalcImage:
http://probesoftware.com/smf/index.php?topic=107.0