Author Topic: Platinum sputter coating  (Read 344 times)

Ben Buse

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Platinum sputter coating
« on: January 25, 2023, 03:17:48 AM »

Has anyone experience with platinum sputter coating? Is it any good with low vacuum rotary pump or does it need turbo pump pressures?

Just read the following website.

"Platinum has a finer grain size than gold or Au/Pd and is therefore more suitable for higher magnification sputtering applications. Platinum also has an excellent SE yield, but the higher work function of platinum results in a slower sputtering than gold. Platinum films tend to be sensitive to “stress cracking” when oxygen is present (oxygen can come from porous specimens).

The Safematic CCU-010 LV low vacuum coater will sputter Pt, but for optimum crack-free results the CCU-010 HV high vacuum coater is recommended."