Author Topic: Removal of carbon coating  (Read 64 times)


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    • John Donovan
Removal of carbon coating
« on: May 30, 2019, 08:11:53 am »
This was posted to the microscopy list server recently.  I thought it worth reposting here:

Carbon coating is fairly easy to remove with Oxygen or Oxigen/Helium plasma. Dedicated plasma cleaner would work the best, but you can even try Evactron or IBSS in-situ cleaners. Plasma cleaner is preferred over plasma etcher, as it typically works with much lower RF power and therefore provides "gentler" cleaning.

For completely chemical removal of carbon coating get a UV cleaner (or find a lab which has it) - the removal would be terribly slow (hours or even couple of days for 50nmĂ‚  C removal), but absolutely no physical damage to the surface.

Easily-removable coating for preventing FIB charging would be to spray-on of one of conductive polymer, either with regular atomizer or better yet with ultrasonic nozzle. Plenty of formulations, I've worked with aquaSAVE (removable by water) and E-Shield (removable by alcohol) with great success (although never tried them on the rock samples).

Valery Ray
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