Hi,
Here are some maps of a glass slide coated in Au in a sputter coater. The glass slide was mounted centrally beneath the target, which is 57mm in diameter and the stage was spinning.
![](https://probesoftware.com/smf/gallery/453_14_08_19_6_34_11.jpeg)
You can see the Au coat is thickest in the middle 15 mm, and also enriched at the edges of the glass slide. Na does the oppose.
Ben