Dear Nicholas,
Thanks for your reply. I meant the radial distances (in µm or nm) measured normal to the primary electron beam axis containing 50.0%, 90.0%, and 99.9% (called D50.0%, D90.0% and D99.9% hereafter, respectively) of the non-absorbed (i.e. escaping from the sample surface) X-ray intensities. The two figures attached to this message may help making things clearer. Figure 1 is a diagram showing the intensity of non-absorbed X-rays (Y axis) with respect to the radial distance (X axis) from the electron beam axis. Using integral calculations, I assume that D50.0% equals the X value for which the area below the curve (i.e. delimited by the curve, the XY axes and the vertical straight line passing by D50.0%) corresponds to 50.0% of the total area located below the curve (i.e. delimited by the curve, the XY axes and the vertical straight line passing by DMAX). Figure 2 is a sketch generated by another software performing Monte Carlo simulations (Casino 2.5). Unfortunately, a lot of post-processing is necessary extract D50.0%, D90.0%, and D99.9%, from this software, and I have to admit to have been unsuccessful yet. Obtaining those values from the DSTA-II software (in the same way we get the "Fractional Emission Depths") would be a great complementary piece of information I think.
Cheers,
Pierre