Bit of an unconventional question, but is it possible in PfE to measure the BSE signal as part of a TDI analysis? I'm looking at the amount of ablation I get of a C coating on a heavy substrate during low kV analyses using TDI and am seeing a steady decrease in absorbed current during each analysis - this can be as large as a ~10% drop so it's not insubstantial. The faraday current is stable. I think this decrease may be due to an increasing BSE coefficient as the C is thinned (BSE imaging after analysis shows bright spots surrounded by darker contamination rings).
Mike