Probe Software Users Forum

General EPMA => EPMA Sample Preparation => Topic started by: Ben Buse on August 14, 2019, 06:35:09 am

Title: Sputter coater, lateral variation
Post by: Ben Buse on August 14, 2019, 06:35:09 am
Hi,

Here are some maps of a glass slide coated in Au in a sputter coater. The glass slide was mounted centrally beneath the target, which is 57mm in diameter and the stage was spinning.

(https://probesoftware.com/smf/gallery/453_14_08_19_6_34_11.jpeg)

You can see the Au coat is thickest in the middle 15 mm, and also enriched at the edges of the glass slide. Na does the oppose.

Ben
Title: Re: Sputter coater, lateral variation
Post by: BenjaminWade on August 18, 2019, 11:47:30 pm
Hi Ben
I assume that perhaps this sputter coater doesnt have a rotating planetary stage and is just a single rotation axis?

Cheers
Title: Re: Sputter coater, lateral variation
Post by: Ben Buse on September 02, 2019, 03:46:17 am
Yes that's right,

I was just looking are many manufacturers sell rotary-planetary-tilting stages. Have you used one? Do you need to tilt?

Ben