However, no stage is mechanically perfect.
The following images show the stage reproducibility of running two maps on exactly the same area using exactly the same conditions for the BSE image.
All replicate maps were 256 x 256 using 0.5 um stage steps and 20, 150 and/or 400 msec dwell per pixel. ImageJ was used to create the animated GIFs using the Stack menu.
Remember, Cameca stages scan in the X axis, JEOL stages scan in the Y axis!
The worst example, first attachment below was Wash. U.'s 8200 which was greatly improved by having the service engineer in to tighten the stage mechanicals.
After the stage was repaired, the improved reproducibility can be seen in the second attachment below.