Today, EDS resolution is determined by:
* The ultimate limit is due to the Fano factor which characterizes the statistical spread in the number of collected photo-electrons. This is physics and for Si can't really be changed except a small amount through cooling. The limit from the Fano factor is approximately 121 eV at Mn Ka (as I recall).
* Then there is electronics. The quality of the preamplifier is critical. Amplifying small currents at high speeds is always limited by Johnson noise - again fundamental physics. But given this, the vendors can optimize their preamplifiers to get as close as possible to this physical limit. I think this is probably where most of the recent increases in resolution are found (but I'm not a vendor.)
* Then there is the digitizer and the quality of the digitizer. Almost all (??all??) vendors now immediately convert their preamplified pulse stream into digital and then operate in the digital regime. Sometimes there is a separate circuit to handle the fast discriminator but not necessarily. Usually the digitization happens at 100 Mhz or so there are many, many digitizations over a single X-ray event.
* Pulse processing times are implemented by averaging the digitized signal. More averaging leads to better resolution (up to a point.)
* Then there is the digital magic that the vendors perform to estimate the pre-X-ray baseline and the post-X-ray baseline - the difference being the best estimate of the energy. There is a leakage current from the detector that needs to be compensated. There is additional digital magic to reject coincidence events and to differentiate noise from signal at the lowest energies.
* There are other reasons why the resolution diminishes like incomplete charge collection (which has been almost eliminate in modern detectors) but these are the biggies. ( I hope I haven't forgotten anything
)
I'm overawed by the resolutions I've measured on some detectors (as good as 124 eV at Mn Ka). We can't expect to see too much additional improvement.