Warren posted this recently on the list server and he said it was OK to re-post it here:
I presume your setup has three different purposes for those pumps and that each one is connected to pump a different part of the system. If so, I don't know that you will be able to combine them to a single vacuum manifold. They could be pumping against different loads at different vacuums. That is the case with our FEI Quanta variable pressure SEM. It has two roughing pumps because it needs to have two. One backs up the turbo pump at the best vacuum possible with whatever pumping load it has. The second pumps on the chamber when it is operating in variable pressure mode (10-160 Pa). In that mode, it would probably be more difficult (and expensive) to use a single pump. The second pump is tied in to help on roughing the chamber when first pumping down, but it is isolated and turned off before the turbo seriously comes into play. So, two pumps was by good design.
Now, if you have three pumps from three different instruments that are working at maximum vacuum all (or most) of the time, you might be able to design a system that could reduce the number of pumps. (Since parts came from different vendors, there was probably not an option to combine vacuum systems.) However, you would probably need extra valves and plumbing and a ballast tank to maintain high vacuum while you borrow a pump for roughing purposes. That would not be a trivial (or cheap) engineering exercise. My experience with engineering projects is that the cost could easily outrun the cost of three brand new vacuum pumps.
FWIW, it might be time to consider other aspects. For example, we swapped out our old, oil-sealed rotary pumps with oil-free dry scroll pumps. That reduced the contamination issues within our SEM. We have also been able to take advantage of manufacturers' occasional sales to get pumps at pretty serious discounts.
Warren Straszheim, Ph.D., manager
Materials Analysis and Research Lab
23 Town Engineering
515-294-8187