I went through the SF correction and have successfully modeled my own standards file (so many hours!)
So you have run your standards to create .PAR files for your standard compositions using Standard.exe? Nice!
Note that for the purposes of simply modeling a boundary fluorescence to get an idea if there is a significant boundary fluorescence issue, you can just utilize the closest compositions you can find that are already modeled. But it's fine to model your own standard compositions of course, though many/most/some will be pretty much identical to the compositions already provided.
But for the purposes of performing a boundary fluorescence correction you need to model the actual compositions of the boundary in your unknown samples. You will need to model both the beam incident and the boundary materials from your probe analyses.
Now it may be that your standard compositions are very similar to your unknown boundary materials, e.g., SiO2 adjacent to TiO2. In that case you are all set to proceed with the boundary fluorescence correction process.
This procedure is explained here:
https://probesoftware.com/smf/index.php?topic=58.msg214#msg214However, from what I understand, to do SF correction for my own data would require a DAT file that can be easily done with Probe for EPMA? unfortunately our probe doesn't install this but could only export csv file, and I also always copy the raw files (.cor, .wt, .qnt, and .cnd) file. I was wondering in this case can I still do the SF correction with these files or I would have to install Probe for EPMA in our probe PC?
It should be pointed out first of all, that if your boundary fluorescence effect is relatively small, e.g., a trace or minor level fluorescence, then one can simply subtract the fluorescence profile from your analysis measurements. There is no need for a full matrix correction of the composition after subtracting the modeled boundary fluorescence, since you will be subtracting such small concentrations from the matrix. You simply need to relate the analysis points to a linear distance scale in microns. An example of this is found here:
https://probesoftware.com/smf/index.php?topic=58.msg5603#msg5603However, if your boundary fluorescence is a significant contribution to the matrix effects, say greater than a few weight percent, you might want to perform the fluorescence correction in CalcZAF with an iterative matrix correction. This is described here:
https://probesoftware.com/smf/index.php?topic=58.msg223#msg223I don't know if the files you describe above are JEOL or Cameca files, but in any case you will need to create your own CalcZAF input files containing the k-ratios (and stage coordinates) in order to perform this boundary fluorescence correction in CalcZAF.
Maybe someone on this forum has a application which can read these OEM files and output a CalcZAF input file format? In any case, here is a post which describes the CalcZAF input file format:
https://probesoftware.com/smf/index.php?topic=81.msg9330#msg9330Good luck and please feel free to share your results with us.